Spatially translatable optical fiber-coupled heterodyne interferometer
نویسندگان
چکیده
منابع مشابه
Optical mixing errors in a fiber-optic coupled heterodyne interferometer
A lightweight and electrically passive interferometer is demanded by a number of applications for precision metrology such as machine tool metrology and on-machine feedback [1]. To satisfy these requirements, a fiber-optic coupled heterodyne displacement measuring Michelson interferometer (FIDMI) shown in Fig.1 has been developed in the Center of Precision Metrology (CPM) at the University of N...
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A high-accuracy (nonlinearity < 2nm) fiber-optic coupled displacement heterodyne measuring Michelson interferometer is developed. The primary limitation of accuracy encountered with this fiber-optic coupled heterodyne interferometer is the optical mixing arising from the imperfection of fiber-optic coupling system. The optical mixing results in the nonlinearity (first order and second order err...
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The use of optical fibers presents several advantages with respect to free-space optical transport regarding source-frequency delivery to individual heterodyne interferometers. Unfortunately, fiber delivery to individual coaxial heterodyne interferometers leads to an increase of (periodic) nonlinearity in the measurement, because transporting coaxial frequencies through one optical fiber leads ...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2017
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.5007070